Circular Nanomagnets: Enhanced Nucleation of Vortices in Soft Magnetic Materials Prepared by Silica Nanosphere Lithography (Adv. Funct. Mater. 5/2011)

Materials and Wireless Microfluidic Systems for Electronics Capable of Chemical Dissolution on Demand (Adv. Funct. Mater. 92015)

Parallel fabrication of magnetic tunnel junction nanopillars by nanosphere lithography

We present a new method for fabricating magnetic tunnel junction nanopillars that uses polystyrene nanospheres as a lithographic template. Unlike the common approaches, which depend on electron beam lithography to sequentially fabricate each nanopillar, this method is capable of patterning a large number of nanopillars simultaneously. Both random and ordered nanosphere patterns have been explor...

Nanomagnets: Growth of Co Nanomagnet Arrays with Enhanced Magnetic Anisotropy (Adv. Sci. 9/2016)

Fabrication of nanopillars by nanosphere lithography

A low cost nanosphere lithography method for patterning and generation of semiconductor nanostructures provides a potential alternative to the conventional top-down fabrication techniques. Forests of silicon pillars of sub-500 nm diameter and with an aspect ratio up to 10 were fabricated using a combination of the nanosphere lithography and deep reactive ion etching techniques. The nanosphere e...

Wafer-scale fabrication of plasmonic crystals from patterned silicon templates prepared by nanosphere lithography.

By combining nanosphere lithography with template stripping, silicon wafers were patterned with hexagonal arrays of nanowells or pillars. These silicon masters were then replicated in gold by metal evaporation, resulting in wafer-scale hexagonal gratings for plasmonic applications. In the nanosphere lithography step, two-dimensional colloidal crystals of 510 nm diameter polystyrene spheres were...